Both Lee De Forest and Robert von Lieben worked with electronic valves (tubes) but based on my understanding, they were limited by the difficulty in evacuating the tube - although in De Forest's case, he thought that it was necessary to function.
1906 - De Forest patents the Audion, limited by his insistence that the trace mercury vapor left by the vacuum process is necessary for it to function. von Lieben patents his own amplifier (need to find more sources on this that aren't in German!)
1913 - Irving Langmuir develops the diffusion pump that allows more of the mercury vapor to be removed from the tube and this helps make the tubes more reliable.
Argh, this is a good question! I'm digging through more sources, but I wanted to get at least a baseline out there.