Problem is that Cult of Reason wasn't that met with much enthuisasm even among revolutionnaries, except more radicals as Cordeliers, and even there not entierly so.
See, atheism was seen as aristocratic, individualist from someone not having truly faith in the humanitarian ideal. Hence why Robespierre and most Jacobins went into Supreme Being worship, as in non-deist religion.
Even as a free-masonry, it have fairly few chances to really hold on because of this, and giving it wasn't, purposelly, organized IOTL... At very best it would survive in republican political rites, but not as a core belief.